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Journal of Micro/Nanolithography, MEMS, and MOEMS

On-chip near-infrared optical spectrometer based on single-mode Epo waveguide and gold nanoantennas
Author(s): Maurine Malak; Konstantins Jefimovs; Irène Philipoussis; Joab Di Francesco; Toralf Scharf
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Paper Abstract

We report about optical spectrometry using gold nanostructures printed on top of an integrated optical waveguide. The optical waveguide is a single-mode buried waveguide made from a combination of photo-polymerizable materials and is fabricated by photolithography on a glass substrate. To detect the electric field inside the waveguide, a gold nanocoupler array of thin lines (50 nm thick and 8 μm in length) is embedded on top of the aforementioned waveguide. They are produced by e-beam lithography. Both waveguide ports are polished, and the output port, in particular, is coated with a thin gold layer to assimilate a mirror and hence, it enables the creation of stationary waves inside the structure. Stationary waves generated inside the guide constitute a spatial interferogram. Locally, light is out-coupled using the nanocouplers and allows measuring the interferogram structure. The resulting pattern is imaged by a vision system involving an optical microscope with the objective lenses of different magnifications and a digital camera mounted on top of the microscope. The 5× objective lens demonstrates a superior performance in retrieving the investigated spectrum compared to 20× and 100× objectives. Fast Fourier transform is performed on the captured signal to extract the spectral content of the measured signal.

Paper Details

Date Published: 20 June 2014
PDF: 7 pages
J. Micro/Nanolith. MEMS MOEMS 13(2) 023011 doi: 10.1117/1.JMM.13.2.023011
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 2
Show Author Affiliations
Maurine Malak, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Konstantins Jefimovs, EMPA (Switzerland)
Irène Philipoussis, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Joab Di Francesco, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

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