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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology
Author(s): Pei Li; Jing Pei; Long-fa Pan; Hans Zappe
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Paper Abstract

We describe a fabrication method for arrays of microlenses of low f -number by using a surface coating and dispensing technology. We demonstrate how to achieve a low f -number by selectively changing the surface wettability, as well as how to precisely control the f -number through control of the dispensing time. This advance enables the fabrication of arrays of microlenses with diameters varying from 400 to 1400 μm, f -number as low as 0.95. In addition, the optical performance tests indicate that this method is suitable for high performance microlens array fabrication. This dispensing technology may be low cost and allow fast fabrication of high-speed microlens arrays, and may thus be particularly useful for biologically inspired advanced optical systems.

Paper Details

Date Published: 28 April 2014
PDF: 5 pages
J. Micro/Nanolith. MEMS MOEMS 13(2) 023004 doi: 10.1117/1.JMM.13.2.023004
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 2
Show Author Affiliations
Pei Li, Tsinghua Univ. (China)
Jing Pei, Tsinghua Univ. (China)
Long-fa Pan, Tsinghua Univ. (China)
Hans Zappe, Univ. of Freiburg (Germany)

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