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Journal of Micro/Nanolithography, MEMS, and MOEMS

Performance evaluation of perforated micro-cantilevers for MEMS applications
Author(s): Kenkere B. M. Swamy; Banibrata Mukherjee; Zishan Ali Syed Mohammed; Suman Chakraborty; Siddhartha Sen
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Paper Abstract

Miniaturized cantilevers are one of the elementary structures that are widely used in many micro-devices and systems. The dynamic performance of micro-cantilevers having process dictated through perforations is investigated. High-aspect ratio, long silicon cantilevers, intended for improved performance through lowered stiffness are designed with a series of through holes and simulated along with similar nonperforated/solid cantilevers for comparison. A few perforated structures are also fabricated using silicon-on-insulator-based multiproject MEMS processes from MEMSCAP Inc. (Durham, North Carolina) by reduced mask level and eliminating complex substrate trenching step. The dynamic behavior of these fabricated structures is experimentally studied for both in-plane and out-of-plane directions. It is shown that, due to the presence of perforations, stiffness in planar direction is lightly affected, whereas in out-of-plane direction it is significantly reduced by <35% . Similarly, the variation of damping in both perforated and nonperforated beams, too, is thoroughly analyzed for the first few modes of vibration. Nevertheless, their frequency response variation of <10% for modal frequencies in both planar and out-of-plane directions as compared to the nonperforated counterparts, points to potential applications in several micro-systems including those based on comb drives.

Paper Details

Date Published: 9 April 2014
PDF: 11 pages
J. Micro/Nanolith. MEMS MOEMS 13(2) 023001 doi: 10.1117/1.JMM.13.2.023001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 2
Show Author Affiliations
Kenkere B. M. Swamy, Indian Institute of Technology Kharagpur (India)
Banibrata Mukherjee, Indian Institute of Technology Kharagpur (India)
Zishan Ali Syed Mohammed, Indian Institute of Technology Kharagpur (India)
Suman Chakraborty, Indian Institute of Technology Kharagpur (India)
Siddhartha Sen, Indian Institute of Technology Kharagpur (India)

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