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Journal of Micro/Nanolithography, MEMS, and MOEMS

Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
Author(s): Thilo Sandner; Thomas Grasshoff; Eric Gaumont; Harald Schenk; Andreas Kenda
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Paper Abstract

A translatory MOEMS actuator with extraordinary large stroke—especially developed for fast optical path length modulation in miniaturized Fourier transform infrared spectrometers (FTSs)—is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5-mm diameter. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible silicon-on-insulator process. Up to ±600  μm amplitude (typically 1 mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration, the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. The thermal influences of packaging technology on MOEMS behavior are discussed in more detail.

Paper Details

Date Published: 20 March 2014
PDF: 14 pages
J. Micro/Nanolith. MEMS MOEMS 13(1) 011115 doi: 10.1117/1.JMM.13.1.011115
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 1
Show Author Affiliations
Thilo Sandner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thomas Grasshoff, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Eric Gaumont, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Andreas Kenda, Carinthian Tech Research AG (Austria)

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