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Journal of Micro/Nanolithography, MEMS, and MOEMS

Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
Author(s): Thilo Sandner; Thomas Grasshoff; Markus Schwarzenberg; Richard Schroedter; Harald Schenk
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Paper Abstract

This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Large quasistatic deflections of ±10  deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. This mirror is 2.6×3.6  mm and operates at 1600 Hz with an 80-deg optical scan range. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array—consisting of five hybrid assembled MEMS devices—is used in an innovative 3-D ToF laser scanner. This enables a distance measuring rate of 1 MVoxel/s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system.

Paper Details

Date Published: 20 February 2014
PDF: 11 pages
J. Micro/Nanolith. MEMS MOEMS 13(1) 011114 doi: 10.1117/1.JMM.13.1.011114
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 1
Show Author Affiliations
Thilo Sandner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thomas Grasshoff, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Markus Schwarzenberg, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Richard Schroedter, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)

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