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Journal of Micro/Nanolithography, MEMS, and MOEMS

Polygonal pyramidal reflector-based micromachined microscanners for bioimaging
Author(s): Xiaojing Mu; Dennis Wee Keong Neo; Hongbin Yu; A. Senthil Kumar; Fook Siong Chau
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Paper Abstract

In order to alleviate problems arising from the dynamic deformation of thin microelectromechanical systems (MEMS) micromirrors and to realize full circumferential scanning (FCS) that is highly desired in some clinic applications, such as gastrointestinal and intravascular investigations, three prototypes of polygonal pyramidal reflector-based MEMS microscanners have been developed and are described. The cascaded chevron-beam electrothermal actuator, comb-drive electrostatic actuator with double T-shaped spring mechanism, and comb-drive electrostatic actuator with resonating mechanism were investigated in detail as a means to drive a polygonal microreflector. The polygonal microreflector, which has multiple facets on its surface, was fabricated through a route involving KOH wet-etching processing and diamond-turning soft lithography technologies. The assembly process of the actuators and the microreflector is also presented. Near-FCS capability can be realized by all the three different MEMS devices. A peak scanning speed up to 180 Hz and a maximum optical scanning angle of 240 deg were achieved by the electrostatic-resonating MEMS microscanner.

Paper Details

Date Published: 16 December 2013
PDF: 9 pages
J. Micro/Nanolith. 13(1) 011109 doi: 10.1117/1.JMM.13.1.011109
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 1
Show Author Affiliations
Xiaojing Mu, National Univ. of Singapore (Singapore)
Dennis Wee Keong Neo, National Univ. of Singapore (Singapore)
Hongbin Yu, A*STAR Institute of Microelectronics (Singapore)
A. Senthil Kumar, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)


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