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Journal of Micro/Nanolithography, MEMS, and MOEMS

Three-dimensional profiling using a still shot
Author(s): Mahesh Kondiparthi
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Paper Abstract

A method to reliably extract object profiles even with surface discontinuities that leads to 2 phase jumps is proposed. The proposed method uses an amplitude-modulated Ronchi grating, which allows one to extract phase and unwrap the same with a single image. Ronchi equivalent image can be derived from modified grating image, which aids in extracting wrapped phase using Fourier transform profilometry. The amplitude of the modified grating aids in phase unwrapping. As we only need a projector that projects an amplitude-modulated grating, the proposed method allows one to extract three-dimensional profile without using full video projectors. This article also deals with noise reduction algorithms for fringe projection techniques.

Paper Details

Date Published: 2 December 2013
PDF: 17 pages
J. Micro/Nanolith. 13(1) 011106 doi: 10.1117/1.JMM.13.1.011106
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 1
Show Author Affiliations
Mahesh Kondiparthi, Indian Institute of Science (India)

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