Journal of Micro/Nanolithography, MEMS, and MOEMSThree-dimensional profiling using a still shot
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A method to reliably extract object profiles even with surface discontinuities that leads to 2nπ phase jumps is proposed. The proposed method uses an amplitude-modulated Ronchi grating, which allows one to extract phase and unwrap the same with a single image. Ronchi equivalent image can be derived from modified grating image, which aids in extracting wrapped phase using Fourier transform profilometry. The amplitude of the modified grating aids in phase unwrapping. As we only need a projector that projects an amplitude-modulated grating, the proposed method allows one to extract three-dimensional profile without using full video projectors. This article also deals with noise reduction algorithms for fringe projection techniques.