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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Special Section Guest Editorial: Emerging MOEMS Technology and Applications

Paper Abstract

This JM3 special section on emerging MOEMS comprises a collection of excellent papers emphasizing new technologies in MOEMS applications that have come to existence. The section includes outstanding new results in commercial research and development in photonics where micro-optics and MEMS are merged and innovative breakthrough devices come to light.

Paper Details

Date Published: 21 March 2014
PDF: 3 pages
J. Micro/Nanolith. 13(1) 011101 doi: 10.1117/1.JMM.13.1.011101
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 13, Issue 1
Show Author Affiliations
M. Edward Motamedi, Revoltech Microsystems (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)
Patrick I. Oden, Texas Instruments Inc. (United States)
Wibool Piyawattanametha, National Electronics and Computer Technology Ctr. (Thailand)


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