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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers
Author(s): Lakshminarayanan Sujatha; Siddhartha G. Murali; Saravanan Mani; Selvakumar V. Subramani

Paper Abstract

This article [J. Micro/Nanolith. MEMS MOEMS. , 12, (3 ), 033020 (2013)] was originally published online on 25 September 2013 with errors in the authors’ names. The names originally appeared as Lakshminarayanan Sujatha, Murali Siddhartha Goutham, Mani Saravanan, and Varatharajan Subramani Selvakumar. The corrected names appear above. All online versions of the article were corrected on 27 September 2013. The article appears correctly in print.

Paper Details

Date Published: 4 October 2013
PDF: 2 pages
J. Micro/Nanolith. 12(4) 049801 doi: 10.1117/1.JMM.12.4.049801
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Lakshminarayanan Sujatha, Rajalakshmi Engineering College (India)
Siddhartha G. Murali, Rajalakshmi Engineering College (India)
Saravanan Mani, Rajalakshmi Engineering College (India)
Selvakumar V. Subramani, Rajalakshmi Engineering College (India)


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