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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Design and fabrication of piezoelectric nanocomposite structures for microdevice applications
Author(s): Arvydas Palevicius; Sigita Ponelyte; Asta Guobiene; Igoris Prosycevas; Judita Puiso; Rokas Sakalys

Paper Abstract

We present a new group of piezoelectric nanocomposite thin films based on integrating piezoelectric material poly(vinylidene fluoride) and nanoparticles of barium titanate in a matrix of an organic polymer poly(methyl methacrylate). Implementation of piezoelectric properties in designed new nanocomposites allows us not only to increase the sensitivity and functionality of the overall system, where this material is used, but also to expand the application fields in sensing and actuating systems. Results implied that new nanostructures fabricated by nanoimprint lithography exhibit good piezoelectric, surface, and mechanical properties and allow independent control of tribological properties. Formed nanocomposite systems were integrated in designing optical components employed in medicine for sensing applications.

Paper Details

Date Published: 5 December 2013
PDF: 6 pages
J. Micro/Nanolith. 12(4) 043004 doi: 10.1117/1.JMM.12.4.043004
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Sigita Ponelyte, Kaunas Univ. of Technology (Lithuania)
Asta Guobiene, Kaunas Univ. of Technology (Lithuania)
Igoris Prosycevas, Kaunas Univ. of Technology (Lithuania)
Judita Puiso, Kaunas Univ. of Technology (Lithuania)
Rokas Sakalys, Kaunas Univ. of Technology (Lithuania)

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