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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Direct surface nanopatterning using pyramidal silicon nanopore arrays as templates
Author(s): Tao Deng; Jian Chen; Mengwei Li; Chenxu Zhao; Zewen Liu

Paper Abstract

Template-based surface nanopatterning techniques are highly efficient methods in realizing different surface nanopatterns, which are the fundamental structures of various nanodevices. We demonstrate a template of pyramidal silicon nanopore array (PSNA) for direct surface nanopatterning. Using the PSNA templates, deposition experiments of platinum (Pt) and gold-palladium (Au-Pd) particles on chromium-coated silicon substrates were performed. Individual Pt nanocubes and nanocube arrays with different shapes and feature sizes as small as 82 nm were obtained. By tuning the gap between the PSNA template and the substrate, Au-Pd microdot arrays with an average diameter of 7.6 μm were also fabricated. As the nanopore size and shape of the PSNA template can be easily controlled, the corresponding size and shape of the transferred surface nanopatterns are tunable. These results indicate the potential of the PSNA templates for large-scale production of nanopatterns with desired sizes and shapes.

Paper Details

Date Published: 18 October 2013
PDF: 6 pages
J. Micro/Nanolith. 12(4) 041307 doi: 10.1117/1.JMM.12.4.041307
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Tao Deng, Tsinghua Univ. (China)
Jian Chen, Tsinghua Univ. (China)
Mengwei Li, Tsinghua Univ. (China)
Chenxu Zhao, Tsinghua Univ. (China)
Zewen Liu, Tsinghua Univ. (China)

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