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Journal of Micro/Nanolithography, MEMS, and MOEMS

Precuring implant photoresists for shrink and patterning control
Author(s): Gustaf Winroth; Erik Rosseel; Christie Delvaux; Efrain A. Sanchez; Monique Ercken
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Paper Abstract

193-nm compatible photoresists are turning out to be the new platform for implant lithography, due to the increasing requirements in both resolution and overlay. Shrinkage of such resists is becoming progressively the most topical issue for aggressive nodes, where conventional pretreatments from older resist platforms, such as ultraviolet flood exposures, are not directly transferable to (meth-)acrylate-type resists. The precuring options available for state-of-the-art implant photoresists for 193-nm lithography is explored, in which we target to reduce the shrinkage during implantation for trenching critical dimensions (CDs) that are relevant for nodes <;20  nm . An extensive study comprising different approaches, including laser-, ion-, and electron-based treatments, is presented. Each treatment is individually investigated with the aim to find not only a valid pretreatment for shrinkage control during implantation, but also to understand what effect alternative pretreatments have on the morphology and the CDs of thick photoresists used as implant stopping layers. Viable options for further process optimization in order to integrate them into device process flows are found. To this extent, the shrink behavior after pretreatment is shown, and the additional shrink dynamics after implantation are compared.

Paper Details

Date Published: 5 September 2013
PDF: 6 pages
J. Micro/Nanolith. 12(4) 041303 doi: 10.1117/1.JMM.12.4.041303
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Gustaf Winroth, IMEC (Belgium)
Erik Rosseel, IMEC (Belgium)
Christie Delvaux, IMEC (Belgium)
Efrain A. Sanchez, IMEC (Belgium)
Monique Ercken, IMEC (Belgium)

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