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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Publisher’s note: Light confinement effect of nonspherical nanoscale solid immersion lenses
Author(s): Myun-Sik Kim; Toralf Scharf; David Nguyen; Ethan Keeler; Skyler Rydberg; Wataru Nakagawa; Gaël D. Osowiecki; Reinhard Voelkel; Hans Peter Herzig

Paper Abstract

This paper [J. Micro/Nanolith. MEMS MOEMS. 12, (2 ), 023015 (Apr–Jun 2013)] was mistakenly published as a regularly contributed paper in the April–June 2013 issue of JM3. It was intended to be published with the special section on “Advanced Fabrication of MEMS and Photonic Devices” guest edited by Freymann, Maher, and Suleski in the October-December 2013 issue of JM3. The paper can be found online at CrossRef

XSLOpenURL/10.1117/1.JMM.12.2.023015

. It also appears in the October–December 2013 print issue with the special section.

Paper Details

Date Published: 24 September 2013
PDF: 2 pages
J. Micro/Nanolith. 12(4) 041299 doi: 10.1117/1.JMM.12.4.041299
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Myun-Sik Kim, SUSS MicroOptics SA (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
David Nguyen, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Ethan Keeler, Montana State Univ. (United States)
Skyler Rydberg, Montana State Univ. (United States)
Wataru Nakagawa, Montana State Univ. (United States)
Gaël D. Osowiecki, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)
Hans Peter Herzig, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


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