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Journal of Micro/Nanolithography, MEMS, and MOEMS

Patterning of colloidal quantum dots for the generation of surface plasmon
Author(s): Yeonsang Park; Young-Geun Roh; Un Jeong Kim; Dae-Young Chung; Hwansoo Suh; Jineun Kim; Sangmo Cheon; Jaesoong Lee; Tae-Ho Kim; Kyung-Sang Cho; Chang-Won Lee
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Paper Abstract

Patterning of colloidal quantum dot (QD) of a nanometer resolution is important for potential applications in micro- or nanophotonics. Several patterning techniques such as polymer composites, molecular key-lock methods, inkjet printing, and the microcontact printing of QDs have been successfully developed and applied to various plasmonic applications. However, these methods are not easily adapted to conventional complementary metal-oxide semiconductor (CMOS)-compatible processes because of either limits in fabrication resolutions or difficulties in sub-100-nm alignment. Here, we present an adaptation of a conventional lift-off method for the patterning of colloidal QDs. This simple method can be later applied to CMOS processes by changing electron beam lithography to photolithography for building up photon-generation elements in various planar geometries. Various shapes formed by colloidal QD clusters such as straight lines, rings, and dot patterns with sub-100-nm size could be fabricated. The patterned structures show sub-10-nm positioning with good fluorescence properties and well-defined sidewall profiles. To demonstrate the applicability of our method, we present a surface plasmon generator from a QD cluster.

Paper Details

Date Published: 25 September 2013
PDF: 6 pages
J. Micro/Nanolith. 12(4) 041202 doi: 10.1117/1.JMM.12.4.041202
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Yeonsang Park, Samsung Advanced Institute of Technology (Korea, Republic of)
Young-Geun Roh, Samsung Advanced Institute of Technology (Korea, Republic of)
Un Jeong Kim, Samsung Advanced Institute of Technology (Korea, Republic of)
Dae-Young Chung, Samsung Advanced Institute of Technology (Korea, Republic of)
Hwansoo Suh, Samsung Advanced Institute of Technology (Korea, Republic of)
Jineun Kim, Samsung Advanced Institute of Technology (Korea, Republic of)
Sangmo Cheon, Samsung Advanced Institute of Technology (Korea, Republic of)
Jaesoong Lee, Samsung Advanced Institute of Technology (Korea, Republic of)
Tae-Ho Kim, Samsung Advanced Institute of Technology (Korea, Republic of)
Kyung-Sang Cho, Samsung Advanced Institute of Technology (Korea, Republic of)
Chang-Won Lee, Samsung Advanced Institute of Technology (Korea, Republic of)


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