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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Special Section Guest Editorial: Advanced Fabrication of MEMS and Photonic Devices

Paper Abstract

Technologies for fabrication of MEMS, optics and photonics at the micro- and nanoscale continue to advance and diversify due to rising demands for miniaturization, cost reduction, functional integration, and increased performance. Examples include diffractive optics, sub-wavelength optics, microrefractive optics, optical waveguides, photonic crystals, plasmonic devices, and heterogeneously integrated active and passive micro- and nano-optical devices. These devices are playing increasing roles in a wide range of applications, including sensors and actuators, communications, imaging, biomedical, data storage, and other areas. Both conventional and unconventional micro- and nanofabrication techniques serve as fundamental enablers for wide ranges of MEMS and passive and active optical components and devices.

Paper Details

Date Published: 16 December 2013
PDF: 1 pages
J. Micro/Nanolith. 12(4) 041201 doi: 10.1117/1.JMM.12.4.041201
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 4
Show Author Affiliations
Georg von Freymann, Technische Univ. Kaiserslautern (Germany)
Mary Ann Maher, SoftMEMS (United States)


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