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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabricating process of hollow out-of-plane Ni microneedle arrays and properties of the integrated microfluidic device
Author(s): Jun Zhu; Ying Cao; Hong Wang; Yigui Li; Xiang Chen; Di Chen
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Paper Abstract

Although microfluidic devices that integrate microfluidic chips with hollow out-of-plane microneedle arrays have many advantages in transdermal drug delivery applications, difficulties exist in their fabrication due to the special three-dimensional structures of hollow out-of-plane microneedles. A new, cost-effective process for the fabrication of a hollow out-of-plane Ni microneedle array is presented. The integration of PDMS microchips with the Ni hollow microneedle array and the properties of microfluidic devices are also presented. The integrated microfluidic devices provide a new approach for transdermal drug delivery.

Paper Details

Date Published: 25 September 2013
PDF: 6 pages
J. Micro/Nanolith. 12(3) 033019 doi: 10.1117/1.JMM.12.3.033019
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 3
Show Author Affiliations
Jun Zhu, Shanghai Jiao Tong Univ. (China)
Ying Cao, Shanghai Jiao Tong Univ. (China)
Hong Wang, Shanghai Jiao Tong Univ. (China)
Yigui Li, Shanghai Jiao Tong Univ. (China)
Xiang Chen, Shanghai Jiao Tong Univ. (China)
Di Chen, Shanghai Jiao Tong Univ. (China)


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