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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

High-stroke, high-order MEMS deformable mirrors
Author(s): Bautista R. Fernandez; Mohamed A. Bouchti; Joel Kubby

Paper Abstract

Monolithic fabrication of continuous facesheet high-aspect ratio gold microelectromechanical systems (MEMS) deformable mirrors (DMs) onto a thermally matched ceramic–glass substrate (WMS-15) has been performed. The monolithic process allows thick layer deposition (tens of microns) of sacrificial and structural materials thus allowing high-stroke actuation to be achieved. The fabrication process does not require wafer bonding to achieve high aspect ratio three-dimensional structures. A gold continuous facesheet mirror with 3.4 nm surface roughness has been deposited on a 16×16 array of X-beam actuators on a 1-mm pitch. A stroke of 6.4 μm was obtained when poking two neighboring actuators. Initial electrostatic actuation displacement results for a high-aspect ratio gold MEMS DM with a continuous facesheet will be discussed.

Paper Details

Date Published: 12 August 2013
PDF: 5 pages
J. Micro/Nanolith. 12(3) 033012 doi: 10.1117/1.JMM.12.3.033012
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 3
Show Author Affiliations
Bautista R. Fernandez, Univ. of California, Santa Cruz (United States)
Mohamed A. Bouchti, Univ. of California, Santa Cruz (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)


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