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Journal of Micro/Nanolithography, MEMS, and MOEMS

Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness
Author(s): Jianbin Su; Dingbang Xiao; Xuezhong Wu; Zhanqiang Hou; Zhihua Chen
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Paper Abstract

We present a dynamic electrical balancing of coupling stiffness for improving the bias stability of micromachined gyroscopes, which embeds the coupling stiffness in a closed-loop system to make the micromachined gyroscope possess more robust bias stability by suppressing the variation of coupling stiffness. The effect of the dynamic electrical balancing control is theoretically analyzed and implemented using a silicon micromachined gyroscope as an example case. It has been experimentally shown that, comparing with open loop detection, the proposed method increased the stability of the amplitude of the mechanical quadrature signal by 38 times, and therefore improved the bias stability by 5.2 times from 89 to 17  deg/h , and the temperature stability of scale factor by 2.7 times from 622 to 231  ppmC . Experimental results effectively indicated the theoretical model of dynamic electrical balancing of coupling stiffness.

Paper Details

Date Published: 2 August 2013
PDF: 9 pages
J. Micro/Nanolith. 12(3) 033008 doi: 10.1117/1.JMM.12.3.033008
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 3
Show Author Affiliations
Jianbin Su, National Univ. of Defense Technology (China)
Dingbang Xiao, National Univ. of Defense Technology (China)
Xuezhong Wu, National Univ. of Defense Technology (China)
Zhanqiang Hou, National Univ. of Defense Technology (China)
Zhihua Chen, National Univ. of Defense Technology (China)


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