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Journal of Micro/Nanolithography, MEMS, and MOEMS

Integrated blue-sensitive polarization-dependent photodetector
Author(s): Jinkui Chu; Zhiwen Wang; Yingjie Zhang; Ze Liu; Yinlong Wang
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Paper Abstract

Multioriented bilayer nanowire polarizers are integrated with photodetectors using only one-time nanoimprint lithography and metal deposition process. In order to keep the position of peak external quantum efficiency of the photodetector unchanged, the bilayer nanowire polarizer is designed to have the highest transmission at 440 nm. The photodetector is integrated with the polarizer after surface treatment. The performance of the fabricated device is then tested, and three characteristics are realized: light-intensity sensitive, polarization sensitive, and blue-light sensitive. The proposed integration method simplified the fabrication process, and the fabricated device avoids the alignment error which would be produced by using discrete elements. The results demonstrate that the proposed integration process is a promising method for fabricating photodetectors with polarization function.

Paper Details

Date Published: 11 July 2013
PDF: 7 pages
J. Micro/Nanolith. 12(3) 033005 doi: 10.1117/1.JMM.12.3.033005
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 3
Show Author Affiliations
Jinkui Chu, Dalian Univ. of Technology (China)
Zhiwen Wang, Dalian Univ. of Technology (China)
Yingjie Zhang, Dalian Univ. of Technology (China)
Ze Liu, Dalian Univ. of Technology (China)
Yinlong Wang, Dalian Univ. of Technology (China)


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