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Journal of Micro/Nanolithography, MEMS, and MOEMS

Hard disk drive thin film head manufactured using nanoimprint lithography
Author(s): Daniel Sullivan; Thomas R. Boonstra; Mark T. Kief; Lily H. Youtt; Sethuraman Jayashankar; Carolyn Van Dorn; Harold Gentile; Sriram Viswanathan; Dexin Wang; Dion Song; Dongsung Hong; Sung-Hoon Gee
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Paper Abstract

The lithographic requirements for the thin film head (TFH) industry are comparable to the semiconductor industry for certain parameters such as resolution and pattern repeatability. In other aspects such as throughput and defectivity, the requirements tend to be more relaxed. These requirements match well with the strengths and weaknesses reported concerning nanoimprint lithography (NIL) and suggest an alternative approach to optical lithography. We demonstrate the proof of concept of using NIL patterning, in particular Jet and Flash™ Imprint Lithography (J-FIL™) (Imprio, Jet and Flash Imprint Lithography, and J-FIL trademarks are the property of Molecular Imprints, Inc.), to build functional TFH devices with performance comparable to standard wafer processing. An Imprio™ 300 tool from Molecular Imprints, Inc. (MII) was modified to process the AlTiC ceramic wafers commonly used in the TFH industry. Templates were produced using commercially viable photomask manufacturing processes and the AlTiC wafer process flow was successfully modified to support NIL processing. Future work is identified to further improve lithographic performance including residual layer thickness uniformity, wafer topography, NIL→NIL overlay, and development of a large imprint field that exceeds what is available in optical lithography.

Paper Details

Date Published: 2 August 2013
PDF: 10 pages
J. Micro/Nanolith. MEMS MOEMS 12(3) 031105 doi: 10.1117/1.JMM.12.3.031105
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 3
Show Author Affiliations
Daniel Sullivan, Seagate Technology LLC (United States)
Thomas R. Boonstra, Seagate Technology LLC (United States)
Mark T. Kief, Seagate Technology LLC (United States)
Lily H. Youtt, Seagate Technology LLC (United States)
Sethuraman Jayashankar, Seagate Technology LLC (United States)
Carolyn Van Dorn, Seagate Technology LLC (United States)
Harold Gentile, Seagate Technology LLC (United States)
Sriram Viswanathan, Seagate Technology LLC (United States)
Dexin Wang, Seagate Technology LLC (United States)
Dion Song, Seagate Technology LLC (United States)
Dongsung Hong, Seagate Technology LLC (United States)
Sung-Hoon Gee, Seagate Technology LLC (United States)

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