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Journal of Micro/Nanolithography, MEMS, and MOEMS

Light confinement effect of nonspherical nanoscale solid immersion lenses
Author(s): Myun-Sik Kim; Toralf Scharf; David Nguyen; Ethan Keeler; Skyler Rydberg; Wataru Nakagawa; Gaël D. Osowiecki; Reinhard Voelkel; Hans Peter Herzig
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Paper Abstract

We report on the light confinement effect observed in nonideally shaped (i.e., nonspherical) nanoscale solid immersion lenses (SIL). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these noncircular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that nonideal SILs exhibit a spot size reduction comparable with that of spherical SILs. When the size of the SIL is of wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in the shape implies a large tolerance in nano-SIL fabrication.

Paper Details

Date Published: 12 June 2013
PDF: 7 pages
J. Micro/Nanolith. 12(2) 023015 doi: 10.1117/1.JMM.12.2.023015
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 2
Show Author Affiliations
Myun-Sik Kim, SUSS MicroOptics SA (Switzerland)
Toralf Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
David Nguyen, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Ethan Keeler, Montana State Univ. (United States)
Skyler Rydberg, Montana State Univ. (United States)
Wataru Nakagawa, Montana State Univ. (United States)
Gaël D. Osowiecki, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)
Hans Peter Herzig, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


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