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Journal of Micro/Nanolithography, MEMS, and MOEMS

MOEMS tunable microlens made of aluminum nitride membranes
Author(s): Steffen Leopold; Tobias Polster; Daniel Paetz; Fabian Knoebber; Oliver Ambacher; Stefan Sinzinger; Martin Hoffmann
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Paper Abstract

We present tunable lenses based on aluminum nitride membranes. The achievable tuning range in the refractive power is 0 to 25 dpt with an external pressure load of ≤20  kPa . The lenses are manufactured using MOEMS technology. For 500-nm-thick membranes with a diameter of 3 mm, a spherical deflection profile is found. The system provides good long-term stability showing no creep or hysteresis. A model for the refractive power versus applied pressure is derived and validated experimentally. Based on this model, design guidelines are discussed. One essential parameter is the residual stress of the aluminum nitride layer that can be controlled during deposition.

Paper Details

Date Published: 10 June 2013
PDF: 9 pages
J. Micro/Nanolith. MEMS MOEMS 12(2) 023012 doi: 10.1117/1.JMM.12.2.023012
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 2
Show Author Affiliations
Steffen Leopold, Technische Univ. Ilmenau (Germany)
Tobias Polster, Technische Univ. Ilmenau (Germany)
Daniel Paetz, Technische Univ. Ilmenau (Germany)
Fabian Knoebber, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Oliver Ambacher, Fraunhofer-Institut für Angewandte Festkörperphysik (Germany)
Stefan Sinzinger, Technische Univ. Ilmenau (Germany)
Martin Hoffmann, Technische Univ. Ilmenau (Germany)

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