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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Three-dimensional imaging using fast micromachined electro-absorptive shutter
Author(s): Yong-Hwa Park; Yong-Chul Cho; Jang-Woo You; Chang-Young Park; Hee-Sun Yoon; Sang-Hun Lee; Jong-Oh Kwon; Seung-Wan Lee; Byung Hoon Na; Gun Wu Ju; Hee Ju Choi; Yong Tak Lee

Paper Abstract

A 20-MHz switching high-speed light-modulating device for three-dimensional (3-D) image capturing and its system prototype are presented. For 3-D image capturing, the system utilizes a time-of-flight (TOF) principle by means of a 20-MHz high-speed micromachined electro-absorptive modulator, the so-called optical shutter. The high-speed modulation is obtained by utilizing the electro-absorption mechanism of the multilayer structure, which has an optical resonance cavity and light-absorption epilayers grown by metal organic chemical vapor deposition process. The optical shutter device is specially designed to have small resistor–capacitor–time constant to get the high-speed modulation. The optical shutter is positioned in front of a standard high-resolution complementary metal oxide semiconductor image sensor. The optical shutter modulates the incoming infrared image to acquire the depth image. The suggested novel optical shutter device enables capturing of a full high resolution-depth image, which has been limited to video graphics array (VGA) by previous depth-capturing technologies. The suggested 3-D image sensing device can have a crucial impact on 3-D–related business such as 3-D cameras, gesture recognition, user interfaces, and 3-D displays. This paper presents micro-opto-electro-mechanical systems-based optical shutter design, fabrication, characterization, 3-D camera system prototype, and image evaluation.

Paper Details

Date Published: 6 June 2013
PDF: 12 pages
J. Micro/Nanolith. 12(2) 023011 doi: 10.1117/1.JMM.12.2.023011
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 2
Show Author Affiliations
Yong-Hwa Park, Samsung Advanced Institute of Technology (Korea, Republic of)
Yong-Chul Cho, Samsung Advanced Institute of Technology (Korea, Republic of)
Jang-Woo You, Samsung Advanced Institute of Technology (Korea, Republic of)
Chang-Young Park, Samsung Advanced Institute of Technology (Korea, Republic of)
Hee-Sun Yoon, Samsung Advanced Institute of Technology (Korea, Republic of)
Sang-Hun Lee, Samsung Advanced Institute of Technology (Korea, Republic of)
Jong-Oh Kwon, Samsung Advanced Institute of Technology (Korea, Republic of)
Seung-Wan Lee, Samsung Advanced Institute of Technology (Korea, Republic of)
Byung Hoon Na, Gwangju Institute of Science and Technology (Korea, Republic of)
Gun Wu Ju, Gwangju Institute of Science and Technology (Korea, Republic of)
Hee Ju Choi, Gwangju Institute of Science and Technology (Korea, Republic of)
Yong Tak Lee, Gwangju Institute of Science and Technology (Korea, Republic of)


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