Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Design, simulation, and fabrication of a MEMS-based air amplifier for electrospray ionization
Author(s): Petr Jurčíček; Helin Zou; Shuai Gao
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent developments in electrospray ionization mass spectrometry (ESI-MS) show that air amplifiers can be utilized to significantly enhance droplet desolvation and to focus gas-phase ions when provided between an electrospray (ES) source and the mass spectrometer (MS). However, these devices are bulky and expensive, which may be a factor prohibiting their broader utilization. We have developed a simple but effective method based on Bernoulli’s principle, the Coanda effect and MEMS processing to focus electrosprayed droplets and liberated gas-phase ions. We demonstrate a computer simulation and fabrication process for a micromachined air amplifier. The simulation results are used to optimize the geometry and to meet performance requirements. The optimized results then provide a design guideline for the device’s fabrication. The air amplifier is formed from two bonded polydimethylsiloxane (PDMS) casts. Each PDMS cast is fabricated through a molding process using a micromachined two-layer SU-8 mold. Experimental results show a 30-fold improvement in the ES current for certain operation conditions while the air amplifier is incorporated in the nano-electrospray ionization (nano-ESI) process. Compared with traditional air amplifiers, the micro-electro-mechanical systems (MEMS) based air amplifier provides good performance while keeping the fabrication process simple and cost effective.

Paper Details

Date Published: 10 May 2013
PDF: 8 pages
J. Micro/Nanolith. 12(2) 023006 doi: 10.1117/1.JMM.12.2.023006
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 2
Show Author Affiliations
Petr Jurčíček, Dalian Univ. of Technology (China)
Helin Zou, Dalian Univ. of Technology (China)
Shuai Gao, Dalian Univ. of Technology (China)


© SPIE. Terms of Use
Back to Top