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Journal of Micro/Nanolithography, MEMS, and MOEMS

Model of curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist based on free volume theory
Author(s): Nan Liu; Jingbei Liu; Jie Lin; Graham Davies; Peng Jin; Dou Zhang
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Paper Abstract

Free volume theory and a model of polymerization kinetics are introduced to predict and analyze the curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist. Curing shrinkage tests have been designed and performed to verify the accuracy of the model. The experimental results are in good agreement with the simulated results of the conversion behavior. The reaction coefficients of polymerization predicted by this model are essentially correct when compared to the classical experimental values. Moreover, the dynamic shrinkage during polymerization determined experimentally matches the simulated result predicted by our model.

Paper Details

Date Published: 10 May 2013
PDF: 6 pages
J. Micro/Nanolith. 12(2) 023005 doi: 10.1117/1.JMM.12.2.023005
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 2
Show Author Affiliations
Nan Liu, Harbin Institute of Technology (China)
Jingbei Liu, Harbin Institute of Technology (China)
Jie Lin, Harbin Institute of Technology (China)
Graham Davies, The Univ. of New South Wales (Australia)
Peng Jin, Harbin Institute of Technology (China)
Dou Zhang, Central South Univ. (China)


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