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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Improvement of mechanical performance for vibratory microgyroscope based on sense mode closed-loop control
Author(s): Dingbang Xiao; Jianbin Su; Zhihua Chen; Zhanqiang Hou; Xinghua Wang; Xuezhong Wu

Paper Abstract

In order to improve its structural sensitivity, a vibratory microgyroscope is commonly sealed in high vacuum to increase the drive mode quality factor. The sense mode quality factor of the microgyroscope will also increase simultaneously after vacuum sealing, which will lead to a long decay time of free response and even self-oscillation of the sense mode. As a result, the mechanical performance of the microgyroscope will be seriously degraded. In order to solve this problem, a closed-loop control technique is presented to adjust and optimize the sense mode quality factor. A velocity feedback loop was designed to increase the electric damping of the sense mode vibration. A circuit was fabricated based on this technique, and experimental results indicate that the sense mode quality factor of the microgyroscope was adjusted from 8052 to 428. The decay time of the sense mode free response was shortened from 3 to 0.5 s, and the vibration-rejecting ability of the microgyroscope was improved obviously without sensitivity degradation.

Paper Details

Date Published: 8 April 2013
PDF: 6 pages
J. Micro/Nanolith. 12(2) 023001 doi: 10.1117/1.JMM.12.2.023001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 2
Show Author Affiliations
Dingbang Xiao, National Univ. of Defense Technology (China)
Jianbin Su, National Univ. of Defense Technology (China)
Zhihua Chen, National Univ. of Defense Technology (China)
Zhanqiang Hou, National Univ. of Defense Technology (China)
Xinghua Wang, National Univ. of Defense Technology (China)
Xuezhong Wu, National Univ. of Defense Technology (China)


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