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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Improvement of insertion loss and quality factor of flexural plate-wave-based alpha-fetoprotein biosensor using groove-type reflective grating structures
Author(s): Chang-Yu Lin; I-Yu Huang; Je-Wei Lan

Paper Abstract

Conventional flexural plate-wave (FPW) transducers have limited applications in biomedical sensing due to their disadvantages such as high insertion loss and low quality factor. To overcome these shortcomings, we propose a FPW transducer on a low phase velocity insulator membrane (5-μm-thick SiO 2 ) with a novel groove-type reflective grating structure design. Additionally, a cystamine self-assembly monolayer and a glutaraldehyde cross-linking layer are implemented on the backside of the FPW device to immobilize alpha-fetoprotein (AFP) antibody. A FPW-based AFP biosensor with low detection limit (5  ng/mL ) can be achieved and used to measure the extreme low concentration of AFP antigen in human serum for early detection of hepatocellular carcinoma. The proposed FPW-based AFP biosensor also demonstrates a very high quality factor (206), low insertion loss (−40.854  dB ), low operating frequency (6.388 MHz), and high sensing linearity (90.7%).

Paper Details

Date Published: 20 March 2013
PDF: 9 pages
J. Micro/Nanolith. MEMS MOEMS 12(1) 013017 doi: 10.1117/1.JMM.12.1.013017
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1
Show Author Affiliations
Chang-Yu Lin, National Sun Yat-Sen Univ. (Taiwan)
I-Yu Huang, National Sun Yat-Sen Univ. (Taiwan)
Je-Wei Lan, National Sun Yat-Sen Univ. (Taiwan)

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