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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror
Author(s): Claudia Reinlein; Michael Appelfelder; Sylvia E. Gebhardt; Erik Beckert; Ramona Eberhardt; Andreas Tünnermann

Paper Abstract

This paper reports on the thermomechanical modeling and characterization of a micro-opto-electro-mechanical systems deformable mirror (DM). This unimorph DM offers a low-temperature cofired ceramic substrate with screen-printed piezoceramic actuators on its rear surface and a machined copper layer on its front surface. We present the DM setup, thermomechanical modeling, and hybrid fabrication. The setup of the DM is transferred into a thermomechanical model in ANSYS Multiphysics. The thermomechanical modeling of the DM evaluates and optimizes the mount material and the copper-layer thickness for the loading cases: homogeneous thermal loading and laser-loading of the mirror. Subsequently, the developed and theoretically optimized DM setup is experimentally validated. The homogeneous loading of the optimized design results in a membrane deformation with a rate of −0.2  μm K −1 , whereas the laser loading causes an opposed change with a rate of −0.2  μm W −1 . Therefore, the proposed mirror design is suitable to precompensate laser-generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35-K preheating of the mirror assembly compensates for an absorbed laser power of 1.25 W. Therefore, the novel compensation regime “compound loading” for the suppression of laser-induced deformations is developed and proven.

Paper Details

Date Published: 13 March 2013
PDF: 10 pages
J. Micro/Nanolith. 12(1) 013016 doi: 10.1117/1.JMM.12.1.013016
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1
Show Author Affiliations
Claudia Reinlein, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Michael Appelfelder, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Sylvia E. Gebhardt, Fraunhofer-Institut für Keramische Technologien und Systeme (Germany)
Erik Beckert, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Ramona Eberhardt, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Andreas Tünnermann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)


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