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Journal of Micro/Nanolithography, MEMS, and MOEMS

Measurement of the gauge factor of few-layer graphene
Author(s): Xiaohu Zheng; Xing Chen; Ji-Kwan Kim; Dong-Weon Lee; Xinxin Li
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Paper Abstract

Graphene, one of the recently discovered carbon nanostructures, has shown good piezoresistive properties. One of the most important areas of research for graphene sheets, in terms of basic science and application in strain or stress sensors, is the measurement of gauge factors. The gauge factors of various layers of graphene sheets are measured based on the equivalent stress beam. The measurement is carried out using a beam-bending method to detect the change in resistance of graphene sheets in different bending states. The gauge factor ranges from 10 to 15, depending on the number of layers in the graphene sheet. These results reveal the piezoresistance effect of single- and multi-layer graphene sheets, which will be of benefit in the fabrication of microsensors. The resistance of graphene sheets decreases as temperature increases from 20°C to 60°C, and the gauge factor is not very sensitive to changes in environmental temperature.

Paper Details

Date Published: 11 February 2013
PDF: 4 pages
J. Micro/Nanolith. 12(1) 013009 doi: 10.1117/1.JMM.12.1.013009
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1
Show Author Affiliations
Xiaohu Zheng, Nanjing Univ. of Aeronautics and Astronautics (China)
Xing Chen, Chonnam National Univ. (Korea, Republic of)
Ji-Kwan Kim, Chonnam National Univ. (Korea, Republic of)
Dong-Weon Lee, Chonnam National Univ. (Korea, Republic of)
Xinxin Li, Shanghai Institute of Microsystem and Information Technology (China)


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