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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Identification and reconstruction of diffraction structures in optical scatterometry using support vector machine method
Author(s): Jinlong Zhu; Shiyuan Liu; Chuanwei Zhang; Xiuguo Chen; Zhengqiong Dong

Paper Abstract

A library search is a widely used method for the reconstruction of diffraction structures in optical scatterometry. In a library search, if the actual geometrical model of a measured signature is different from the model used in the establishment of a library, the search result will be meaningless. Therefore, the identification of the geometrical profile for a measured signature is critical. In addition, fast searching of the library is essential to find a best-matched signature even though the library may have huge amounts of data. The authors propose a support vector machine (SVM)-based method to deal with these issues. First, an SVM classifier is trained to identify the geometrical profile of a diffraction structure from its measured signature, and then another set of several SVM classifiers are trained to map the measured signature into a sublibrary to accelerate the search process. Simulations and experiments have demonstrated that the SVM classifier can identify the geometrical profile of one-dimensional trapezoidal gratings accurately, and the SVM-based library search strategy can achieve a fast and robust extraction of parameters for diffraction structures.

Paper Details

Date Published: 17 January 2013
PDF: 10 pages
J. Micro/Nanolith. 12(1) 013004 doi: 10.1117/1.JMM.12.1.013004
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1
Show Author Affiliations
Jinlong Zhu, Huazhong Univ. of Science and Technology (China)
Shiyuan Liu, Huazhong Univ. of Science and Technology (China)
Chuanwei Zhang, Huazhong Univ. of Science and Technology (China)
Xiuguo Chen, Huazhong Univ. of Science and Technology (China)
Zhengqiong Dong, Huazhong Univ. of Science and Technology (China)


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