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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and fabrication of a micromachined free-floating membrane on a flexible substrate
Author(s): Harsh Sundani; Vijay K. Devabhaktuni; Christopher Melkonian; Mansoor Alam
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Paper Abstract

A microelectromechanical system (MEMS) device might function perfectly well in the controlled environment in which it has been created. However, the device can be a real viable product only after it has been fabricated with proven performance in a package. As such, the assembly yield of a MEMS package is often a challenging target to meet. The design and fabrication of a free-floating membrane on a flexible substrate to enable easy and cost-effective packaging of MEMS devices is examined. Since standard MEMS fabrication processes are designed for rigid substrates, several process modifications were required to handle flexible substrates. The adaptation of each fabrication process has been documented. Furthermore, detailed information regarding the selection of compatible materials, as well as incompatibilities that were encountered, has been presented to aid future researchers in developing processes for flexible substrates.

Paper Details

Date Published: 7 January 2013
PDF: 10 pages
J. Micro/Nanolith. 12(1) 013002 doi: 10.1117/1.JMM.12.1.013002
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1
Show Author Affiliations
Harsh Sundani, The Univ. of Toledo (United States)
Vijay K. Devabhaktuni, The Univ. of Toledo (United States)
Christopher Melkonian, Midwest MicroDevices, LLC (United States)
Mansoor Alam, The Univ. of Toledo (United States)


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