Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Development of microthermoelectric generators using integrated suspending bridge-type polysilicon thin-film thermopiles
Author(s): I-Yu Huang; Guan-Ming Chen; Ting-Yi Wu
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We describe the development of novel suspension bridge-type microthermoelectric generators (μ -TEGs) having 64,000 to 147,000 serial-connected thermocouples in a 1-centimeter-square chip area using surface micromachining techniques. Each microthermocouple is constructed by a pair of n/p bridge-type polysilicon thin-film thermolegs and a pair of cold- and hot-side Cr/Au metal planes. Under a controlled fixed temperature difference between the cold/hot sides, the open-circuit voltage and the output power of the proposed μ -TEGs are simulated by commercial software (ANSYS). The influences of thermocouple thermo-leg dimensions and number of thermocouples on the thermoelectric characteristics of presented μ -TEGs are investigated. The implemented suspension bridge-type thermopile has a 2.5-μm-height air-gap separation from substrate and its fabrication yield is higher than 75% in the laboratory environment. The measured maximum temperature difference between the cold/hot sides of the proposed μ -TEGs is about 1.29°C, a maximum open-circuit voltage of 4.64  V/cm 2 and output power of 0.65  μW/cm 2 can be obtained.

Paper Details

PDF: 9 pages
J. Micro/Nanolith. 12(1) 013001 doi: 10.1117/1.JMM.12.1.013001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1, January 2013
Show Author Affiliations
I-Yu Huang, National Sun Yat-Sen Univ. (Taiwan)
Guan-Ming Chen, National Sun Yat-Sen Univ. (Taiwan)
Ting-Yi Wu, National Sun Yat-Sen Univ. (Taiwan)


© SPIE. Terms of Use
Back to Top