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Journal of Micro/Nanolithography, MEMS, and MOEMS

Development of microthermoelectric generators using integrated suspending bridge-type polysilicon thin-film thermopiles
Author(s): I-Yu Huang; Guan-Ming Chen; Ting-Yi Wu
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Paper Abstract

We describe the development of novel suspension bridge-type microthermoelectric generators (μ -TEGs) having 64,000 to 147,000 serial-connected thermocouples in a 1-centimeter-square chip area using surface micromachining techniques. Each microthermocouple is constructed by a pair of n/p bridge-type polysilicon thin-film thermolegs and a pair of cold- and hot-side Cr/Au metal planes. Under a controlled fixed temperature difference between the cold/hot sides, the open-circuit voltage and the output power of the proposed μ -TEGs are simulated by commercial software (ANSYS). The influences of thermocouple thermo-leg dimensions and number of thermocouples on the thermoelectric characteristics of presented μ -TEGs are investigated. The implemented suspension bridge-type thermopile has a 2.5-μm-height air-gap separation from substrate and its fabrication yield is higher than 75% in the laboratory environment. The measured maximum temperature difference between the cold/hot sides of the proposed μ -TEGs is about 1.29°C, a maximum open-circuit voltage of 4.64  V/cm 2 and output power of 0.65  μW/cm 2 can be obtained.

Paper Details

PDF: 9 pages
J. Micro/Nanolith. 12(1) 013001 doi: 10.1117/1.JMM.12.1.013001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 12, Issue 1, January 2013
Show Author Affiliations
I-Yu Huang, National Sun Yat-Sen Univ. (Taiwan)
Guan-Ming Chen, National Sun Yat-Sen Univ. (Taiwan)
Ting-Yi Wu, National Sun Yat-Sen Univ. (Taiwan)

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