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Journal of Micro/Nanolithography, MEMS, and MOEMS

Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy
Author(s): Mohammad J. Moghimi; Chris R. Wilson; David L. Dickensheets
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Paper Abstract

Micro-optoelectromechanical systems (MOEMS) deformable mirrors are being developed for focus control in miniature optical systems including endoscopic microscopes and small form-factor camera lenses. A new process is described to create membrane mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration, are described. Multiple actuation electrodes allow active control of more than 1.4 μm peak-to-peak of wavefront spherical aberration. The MOEMS mirror is demonstrated in a confocal microscope in which it provides focus control during capture of in vivo images.

Paper Details

Date Published: 12 October 2012
PDF: 9 pages
J. Micro/Nanolith. 11(4) 043006 doi: 10.1117/1.JMM.11.4.043006
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 4
Show Author Affiliations
Mohammad J. Moghimi, Montana State Univ. (United States)
Chris R. Wilson, Bridger Photonics, Inc. (United States)
David L. Dickensheets, Montana State Univ. (United States)


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