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Journal of Micro/Nanolithography, MEMS, and MOEMS

Experimental investigation of three-dimensional interconnect processing wafers
Author(s): Yi-sha Ku; Po-Yi Chang; Chris Shen
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Paper Abstract

The use and enhancement of a semi-automated wafer characterization tool, a dual channel capacitive sensor module, is demonstrated by implementing a new measurement algorithm for metallization process control. This tool is capable of measuring the deposited metal film thickness induced bow and warpage in a full wafer surface scan. The nondestructive solution can measure Cu metal film thickness with a total measurement uncertainty of 0.18 μm (1∂). The stress conversion map can be obtained based on the modified Stoney's formula and the capacitance-displacement technique. A wafer thinning process was also performed to characterize the warpage/bow of 8-in. wafers, which continues to increase as wafer thicknesses are reduced from 725 to 300 μm. There was a linear relationship between the wafer warpage and bow and the square of the inverse of the thickness. Metrology results from actual 3-D interconnect processing wafers are presented.

Paper Details

Date Published: 1 October 2012
PDF: 9 pages
J. Micro/Nanolith. MEMS MOEMS 11(4) 043002 doi: 10.1117/1.JMM.11.4.043002
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 4
Show Author Affiliations
Yi-sha Ku, Industrial Technology Research Institute (Taiwan)
Po-Yi Chang, Industrial Technology Research Institute (Taiwan)
Chris Shen, Industrial Technology Research Institute (Taiwan)

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