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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation
Author(s): Konstantin Koshelev; Vladimir V. Ivanov; Viacheslav Medvedev; Vladimir M. Krivtsun; Vladimir G. Novikov; Alexander S. Grushin

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Paper Details

Date Published: 26 June 2012
PDF: 2 pages
J. Micro/Nanolith. 11(2) 029802 doi: 10.1117/1.JMM.11.2.029802
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Konstantin Koshelev, Institute of Spectroscopy (Russian Federation)
Vladimir V. Ivanov, Institute of Spectroscopy (Russian Federation)
Viacheslav Medvedev, Institute of Spectroscopy (Russian Federation)
Vladimir M. Krivtsun, Institute of Spectroscopy (Russian Federation)
Vladimir G. Novikov, M. V. Keldysh Institute of Applied Mathematics (Russian Federation)
Alexander S. Grushin, M. V. Keldysh Institute of Applied Mathematics (Russian Federation)


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