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Journal of Micro/Nanolithography, MEMS, and MOEMS

Laser-based microstructuring of surfaces using low-cost microlens arrays
Author(s): Daniel Nieto Garcia; Gemma Vara; Jose Antonio Diez; Gerard M. O'Connor; Carlos Gomez-Reino Carnota; María Teresa Flores-Arias; Justo Arines
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Paper Abstract

Since frictional interactions in microscopically small components are becoming increasingly important for the development of new products for all modern technology, we present a laser-based technique for micro-patterning surfaces of materials using low-cost microlens arrays. By combining a laser direct-write technique on soda-lime glass and a thermal treatment, it was possible to obtain high quality microlens array elements using a low cost infrared laser widely implemented in industry which makes this technique attractive in comparison with other more expensive methods. The main advantage of using microlens arrays for micropatterning surfaces is the possibility of fabricating a large number of identical structures simultaneously, leading to a highly efficient process. In order to study the capabilities of the microlenses fabricated for microstructuring materials, identical structures and arrays of holes were fabricated over a variety of materials, such as stainless steel, polymer, and ceramic. The minimum diameter of the individual microstructure generated at surface was 5 µm. Different nanosecond lasers operating at infrared and green wavelengths were used. The topography and morphology of the elements obtained were determined using confocal microscopy.

Paper Details

Date Published: 20 June 2012
PDF: 8 pages
J. Micro/Nanolith. MEMS MOEMS 11(2) 023014 doi: 10.1117/1.JMM.11.2.023014
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Daniel Nieto Garcia, Parque Tecnológico en Miramon, San Sebastián (Spain)
Gemma Vara, Parque Tecnológico en Miramon, San Sebastián (Spain)
Jose Antonio Diez, Parque Tecnológico en Miramon, San Sebastián (Spain)
Gerard M. O'Connor, National Univ. of Ireland, Galway (Ireland)
Carlos Gomez-Reino Carnota, Univ. de Santiago de Compostela (Spain)
María Teresa Flores-Arias, Univ. de Santiago de Compostela (Spain)
Justo Arines, Univ. de Santiago de Compostela (Spain)

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