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Journal of Micro/Nanolithography, MEMS, and MOEMS

MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers
Author(s): Anna Rissanen; Altti Akujärvi; Jarkko E. Antila; Martti Blomberg; Heikki K. Saari
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Paper Abstract

New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

Paper Details

Date Published: 25 May 2012
PDF: 7 pages
J. Micro/Nanolith. 11(2) 023003 doi: 10.1117/1.JMM.11.2.023003
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Anna Rissanen, VTT Technical Research Ctr. of Finland (Finland)
Altti Akujärvi, VTT Technical Research Ctr. of Finland (Finland)
Jarkko E. Antila, VTT Technical Research Ctr. of Finland (Finland)
Martti Blomberg, VTT Technical Research Ctr. of Finland (Finland)
Heikki K. Saari, VTT Technical Research Ctr. of Finland (Finland)


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