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Journal of Micro/Nanolithography, MEMS, and MOEMS

Parameter extraction of MEMS comb-drive near-resonance equivalent circuit: physically-based technique for a unique solution
Author(s): Yasser M. Sabry; Mostafa Medhat; Bassam Saadany; Diaa Khalil; Tarik Bourouina
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Paper Abstract

A new extraction approach for MEMS comb-drive equivalent circuit parameters is presented. The proposed method eliminates the need for fitting and optimization by direct extraction from the measured data and, thus, avoids the nonuniqueness problem associated with fitting algorithms. A silicon-on-insulator-based MEMS comb-drive actuator is designed, fabricated, and measured, and its equivalent circuit is obtained by the proposed procedure. Analytical estimation for the uncertainty in the extracted values due to the discrete nature of the measurement frequency resolution is carried out. Uncertainty in the extracted values of the equivalent motional parameters is well below 0.6% when a 0.1-Hz frequency resolution is used. The method has been used to extract the resonator quality factor at both atmospheric and vacuum operations and can be extended to other types of resonators.

Paper Details

Date Published: 7 May 2012
PDF: 10 pages
J. Micro/Nanolith. 11(2) 021205 doi: 10.1117/1.JMM.11.2.021205
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Yasser M. Sabry, Si-Ware Systems (Egypt)
Mostafa Medhat, Si-Ware Systems (Egypt)
Bassam Saadany, Si-Ware Systems (Egypt)
Diaa Khalil, Si-Ware Systems (Egypt)
Tarik Bourouina, Univ. Paris-Est (France)

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