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Journal of Micro/Nanolithography, MEMS, and MOEMS

Free-standing spectral purity filters for extreme ultraviolet lithography
Author(s): Nikolay I. Chkhalo; Mikhail N. Drozdov; Evgeniy B. Kluenkov; Alexsei Ya. Lopatin; Valerii I. Luchin; Nikolay N. Salashchenko; Nikolay N. Tsybin; Leonid A. Sjmaenok; Vadim E. Banine; Andrei M. Yakunin
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Paper Abstract

Free-standing multilayer films consisting of Si, Zr, Mo and silicides of both metals have been fabricated and studied as spectral purity filters (SPF) for extreme ultraviolet (EUV) (13.5 nm) lithography tools. Comparative tests of multilayer SPF structures of various compositions have been performed at high power loads. It was found that a Mo/ZrSi2 structure with MoSi2 capping layers is featured with capability to withstand prolonged heating in vacuum (10−7  mbar) at 900-950°C. A technique of fabrication of large aperture free-standing multilayers was developed, and a pilot sample of the above film structure of 160 mm in diameter, 50 nm thick, with transparency at 13.5 nm above 70% was fabricated as a conceptual prototype of SPFs with large dimensions.

Paper Details

Date Published: 31 May 2012
PDF: 8 pages
J. Micro/Nanolith. 11(2) 021115 doi: 10.1117/1.JMM.11.2.021115
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Nikolay I. Chkhalo, Institute for Physics of Microstructures (Russian Federation)
Mikhail N. Drozdov, Institute for Physics of Microstructures (Russian Federation)
Evgeniy B. Kluenkov, Institute for Physics of Microstructures (Russian Federation)
Alexsei Ya. Lopatin, Institute for Physics of Microstructures (Russian Federation)
Valerii I. Luchin, Institute for Physics of Microstructures (Russian Federation)
Nikolay N. Salashchenko, Institute for Physics of Microstructures (Russian Federation)
Nikolay N. Tsybin, Institute for Physics of Microstructures (Russian Federation)
Leonid A. Sjmaenok, PhysTeX (Netherlands)
Vadim E. Banine, ASML Netherlands B.V. (Netherlands)
Andrei M. Yakunin, ASML Netherlands B.V. (Netherlands)


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