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Journal of Micro/Nanolithography, MEMS, and MOEMS

Return-to-zero line code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation
Author(s): Konstantin Koshelev; Vladimir Ivanov; Viacheslav Medvedev; Vladimir M. Krivtsun; Vladimir G. Novikov; Alexander S. Grushin
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Paper Abstract

An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the return-to-zero line code-a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.

Paper Details

Date Published: 21 May 2012
PDF: 7 pages
J. Micro/Nanolith. 11(2) 021112 doi: 10.1117/1.JMM.11.2.021112
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Konstantin Koshelev, Institute of Spectroscopy (Russian Federation)
Vladimir Ivanov, Institute of Spectroscopy (Russian Federation)
Viacheslav Medvedev, Institute of Spectroscopy (Russian Federation)
Vladimir M. Krivtsun, Institute of Spectroscopy (Russian Federation)
Vladimir G. Novikov, M. V. Keldysh Institute of Applied Mathematics (Russian Federation)
Alexander S. Grushin, M. V. Keldysh Institute of Applied Mathematics (Russian Federation)


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