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Journal of Micro/Nanolithography, MEMS, and MOEMS

How to write a good scientific paper: title, abstract, and keywords
Author(s): Chris A. Mack
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Paper Abstract

This is the first in a planned series of editorials covering all aspects of good science writing.

Paper Details

Date Published: 15 June 2012
PDF: 5 pages
J. Micro/Nanolith. 11(2) 020101 doi: 10.1117/1.JMM.11.2.020101
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 2
Show Author Affiliations
Chris A. Mack, SEMATECH Inc. (United States)


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