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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Fabrication of functional silicon-based nanoporous membranes
Author(s): Nazar Ileri; Pieter Stroeve; Ahmet Palazoglu; Roland Faller; Hoang T. Nguyen; Jerald A. Britten; Sonia E. Letant; Joseph W. Tringe; Saleem H. Zaidi

Paper Abstract

Macroscopic porous membranes with pore diameter uniformity approaching the nanometer scale have great potential to significantly increase the speed, selectivity, and efficiency of molecular separations. We present fabrication, characterization, and molecular transport evaluation of nanoporous thin silicon-based sieves created by laser interferometric lithography (LIL). This fabrication approach is ideally suited for the integration of nanostructured pore arrays into larger microfluidic processing systems, using a simple all-silicon lithographic process. Submilli-meter-scale planar arrays of uniform cylindrical and pyramidal nanopores are created in silicon nitride and silicon, respectively, with average pore diameters below 250 nm and significantly smaller standard error than commercial polycarbonate track etched (PCTE) membranes. Molecular transport properties of short cylindrical pores fabricated by LIL are compared to those of thicker commercial PCTE membranes for the first time. A 10-fold increase in pyridine pore flux is achieved with thin membranes relative to commercial sieves, without any modification of the membrane surface.

Paper Details

Date Published: 22 March 2012
PDF: 8 pages
J. Micro/Nanolith. 11(1) 013012 doi: 10.1117/1.JMM.11.1.013012
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 1
Show Author Affiliations
Nazar Ileri, Univ. of California, Davis (United States)
Pieter Stroeve, Univ. of California, Davis (United States)
Ahmet Palazoglu, Univ. of California, Davis (United States)
Roland Faller, Univ. of California, Davis (United States)
Hoang T. Nguyen, Lawrence Livermore National Lab. (United States)
Jerald A. Britten, Lawrence Livermore National Lab. (United States)
Sonia E. Letant, Lawrence Livermore National Lab. (United States)
Joseph W. Tringe, Lawrence Livermore National Lab. (United States)
Saleem H. Zaidi, Gratings, Inc. (United States)


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