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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Metrological scanning probe microscope based on a quartz tuning fork detector
Author(s): Bakir Babic; Chris H. Freund; Jan Herrmann; Malcolm A. Lawn; John Miles

Paper Abstract

We give an overview of the design of a metrological scanning probe microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the International System of Units (SI) meter at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100  μm × 100  μm × 25  μm with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented.

Paper Details

Date Published: 2 March 2012
PDF: 7 pages
J. Micro/Nanolith. 11(1) 011003 doi: 10.1117/1.JMM.11.1.011003
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 1
Show Author Affiliations
Bakir Babic, The Univ. of Queensland (Australia)
Chris H. Freund, National Measurement Institute of Australia (Australia)
Jan Herrmann, National Measurement Institute of Australia (Australia)
Malcolm A. Lawn, National Measurement Institute of Australia (Australia)
John Miles, National Measurement Institute of Australia (Australia)


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