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Journal of Micro/Nanolithography, MEMS, and MOEMS

Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope
Author(s): Virpi Korpelainen; Jeremias Seppä; Antti Lassila
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Paper Abstract

Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of atomic force microscopes (AFMs). In order to have traceability to the SI-meter, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task-specific measurement strategies for step height and pitch calibrations with the Centre for Metrology and Accreditation's (MIKES's) metrological AFM are described. The strategies were developed to give high accuracy and to reduce measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given. Standard uncertainties are 0.016 and 0.018 nm for 300 and 700 nm pitch standards, respectively, and 0.21 and 0.44 nm for 7 and 1000 nm step height standards.

Paper Details

Date Published: 28 February 2012
PDF: 8 pages
J. Micro/Nanolith. 11(1) 011002 doi: 10.1117/1.JMM.11.1.011002
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 1
Show Author Affiliations
Virpi Korpelainen, MIKES Mittatekniikan keskus (Finland)
Jeremias Seppä, MIKES Mittatekniikan keskus (Finland)
Antti Lassila, MIKES Mittatekniikan keskus (Finland)

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