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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Dimensional Metrology with Atomic Force Microscopy

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Paper Details

Date Published: 24 February 2012
PDF: 2 pages
J. Micro/Nanolith. MEMS MOEMS 11(1) 011001 doi: 10.1117/1.JMM.11.1.011001
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 11, Issue 1
Show Author Affiliations
Ronald G. Dixson, National Institute of Standards and Technology (United States)
Ndubuisi G. Orji, National Institute of Standards and Technology (United States)


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