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Journal of Electronic Imaging

Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction
Author(s): Katsuichi Kitagawa
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Paper Abstract

As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multiwavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.

Paper Details

Date Published: 10 May 2012
PDF: 10 pages
J. Electron. Imag. 21(2) 021107 doi: 10.1117/1.JEI.21.2.021107
Published in: Journal of Electronic Imaging Volume 21, Issue 2
Show Author Affiliations
Katsuichi Kitagawa, Toray Precision Co., Ltd. (Japan)

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