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Optical Engineering

Surface roughness measurement in the submicrometer range using laser scattering
Author(s): S. H. Wang; Chenggen Quan; Cho Jui Tay; Huai Min Shang
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Paper Abstract

A technique for measuring surface roughness in the submicrometer range is developed. The principle of the method is based on laser scattering from a rough surface. A telecentric optical setup that uses a laser diode as a light source is used to record the light field scattered from the surface of a rough object. The light intensity distribution of the scattered band, which is correlated to the surface roughness, is recorded by a linear photodiode array and analyzed using a singlechip microcomputer. Several sets of test surfaces prepared by different machining processes are measured and a method for the evaluation of surface roughness is proposed.

Paper Details

Date Published: 1 June 2000
PDF: 5 pages
Opt. Eng. 39(6) doi: 10.1117/1.602535
Published in: Optical Engineering Volume 39, Issue 6
Show Author Affiliations
S. H. Wang, National Univ. of Singapore (Singapore)
Chenggen Quan, National Univ. of Singapore (Singapore)
Cho Jui Tay, Institute of Microelectronics (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)

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