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Optical Engineering

Surface roughness measurement in the submicrometer range using laser scattering
Author(s): S. H. Wang; Chenggen Quan; Cho Jui Tay; Huai Min Shang
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Paper Details

Date Published: 1 June 2000
PDF: 5 pages
Opt. Eng. 39(6) doi: 10.1117/1.602535
Published in: Optical Engineering Volume 39, Issue 6
Show Author Affiliations
S. H. Wang, National Univ. of Singapore (Singapore)
Chenggen Quan, National Univ. of Singapore (Singapore)
Cho Jui Tay, Institute of Microelectronics (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)


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