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Optical Engineering

Testing layered synthetic microstructures by computer processing of their digitized electron-microscope cross sections
Author(s): Marc-Olivier Flaissier; Georges Rasigni; Monique Rasigni; Christophe Guichet
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Paper Abstract

Recently, a method was developed for determining interface profiles of extreme-ultraviolet layered synthetic microstructures (LSMs), which is based on computer processing of digitized LSM electron micrographs. Nickel/carbon and molybdenum/carbon multilayers are studied and analyzed in order to show the potentialities of the method in controlling the uniformity of the period and the thickness of the layers when LSMs are manufactured. Such a method makes it possible to get information about the quality of LSMs on a nanometer scale.

Paper Details

Date Published: 1 May 2000
PDF: 5 pages
Opt. Eng. 39(5) doi: 10.1117/1.602502
Published in: Optical Engineering Volume 39, Issue 5
Show Author Affiliations
Marc-Olivier Flaissier, Faculte des Sciences et Techniques de St Jerome (France)
Georges Rasigni, Univ. d'Aix-Marseille III (France)
Monique Rasigni, Univ. d'Aix-Marseille III (France)
Christophe Guichet, Faculte des Sciences et Techniques de St. Jerome (France)


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