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Optical Engineering

Phase-shifting interferometry: minimization of systematic errors
Author(s): Parameswaran Hariharan
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Paper Abstract

Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique.

Paper Details

Date Published: 1 April 2000
PDF: 3 pages
Opt. Eng. 39(4) doi: 10.1117/1.602443
Published in: Optical Engineering Volume 39, Issue 4
Show Author Affiliations
Parameswaran Hariharan, Univ. of Sydney (Australia)

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