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Optical Engineering

Concept of two-dimensional swing curves for critical dimension prediction and optimization of resist/antireflective coating bilayers in topographic situations
Author(s): Andre Schiltz; Patrick Schiavone
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Paper Details

Date Published: 1 March 2000
PDF: 11 pages
Opt. Eng. 39(3) doi: 10.1117/1.602427
Published in: Optical Engineering Volume 39, Issue 3
Show Author Affiliations
Andre Schiltz, France Telecom CNET-CNS (France)
Patrick Schiavone, France Telecom CNET-CNS (France)


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